1 Scope
This part of IEC 62047 specifies a method for bending fatigue testing using resonant vibration of microscale
mechanical structures of MEMS (micro-electromechanical systems) and micromachines.
This standard applies to vibrating structures ranging in size from 10 μm to 1 000 μm
in the plane direction and from 1 μm to 100 μm in thickness, and test materials measuring
under 1 mm in length, under 1 mm in width, and between 0,1 μm and 10 μm in thickness.
The main structural materials for MEMS, micromachine, etc. have special features,
such as typical dimensions of a few microns, material fabrication by deposition, and
test piece fabrication by means of non-mechanical machining, including photolithography.
The MEMS structures often have higher fundamental resonant frequency and higher strength
than macro structures. To evaluate and assure the lifetime of MEMS structures, a fatigue
testing method with ultra high cycles (up to 10 12 ) loadings needs to be established. The object of the test method is to evaluate the
mechanical fatigue properties of microscale materials in a short time by applying
high load and high cyclic frequency bending stress using resonant vibration.