Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films
Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films
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What is BS EN 62047-17 - Mechanical properties of thin films about?
BS EN 62047-17 is the 17th part of an international standard used for semiconductor devices. BS EN 62047-17 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μm to 10 μm, and the width of the rectangular
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