Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials
Semiconductor devices. Micro-electromechanical devices - Test method for Poisson's ratio of thin film MEMS materials
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What is BS EN 62047-21 - Poisson's ratio of thin-film MEMS materials about?
BS EN 62047-21 is the 21st part of an international standard used for semiconductor devices. BS EN 62047-21 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.
Who is BS EN 62047-21 - Poisson's ratio of thin-film MEMS materials for?
BS EN 62047-21 on Semiconductor devices is useful for:
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