Semiconductor devices. Micro-electromechanical devices - Thin film standard test piece for tensile testing
Semiconductor devices. Micro-electromechanical devices - Thin film standard test piece for tensile testing
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What is BS EN 62047-3 — Thin film tensile testing about?
BS EN 62047-3 i s the third part of the multi-series standard that focuses on aspects of semiconductor devices. BS EN 62047-3 specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin-film materials with length and width under 1 mm and thickness under 10 μm, which are the main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.
Who is BS EN 62047-3 — Thin film tensile testing for ?
BS EN 62047-3
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