1 Scope
This document specifies a procedure for the determination of averaged interface position between two different layered materials recorded in the cross-sectional image of the multi-layered materials . It is not intended to determine the simulated interface of the multi-layered materials expected through the multi-slice simulation ( MSS ) method. This document is applicable to the cross-sectional images of the multi-layered materials recorded by using a transmission electron microscope ( TEM ) or a scanning transmission electron microscope ( STEM ) and the cross-sectional elemental mapping images by using an energy dispersive X-ray spectrometer ( EDS ) or an electron energy loss spectrometer ( EELS ). This document is also applicable to the digitized image recorded on an image sensor built into a digital camera , a digital memory set in the PC or an imaging plate and the digitalized image converted from an analogue image recorded on the photographic film by an image scanner .