State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Geometrical shapes, linear size and manufacturing material requirements

Description in Russian:
Государственная система обеспечения единства измерений. Меры рельефные нанометрового диапазона из монокристаллического кремния. Требования к геометрическим формам, линейным размерам и выбору материала для изготовления

Document status:

Active

Format:

Electronic (PDF)

Page count:

Delivery time (for English version):

2 business days

Delivery time (for Russian version):

1 business day

SKU:

GOST22422

GOST 8.592-2009

State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Geometrical shapes, linear size and manufacturing material requirements

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