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IEC 62047-29:2017 PDF

Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature

Название (английский):
IEC 62047-29:2017

Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature

Статус документа:
Действующий
Формат:
Электронный (PDF)
Количество страниц:
12
Дата публикации:
22 ноября 2017 г.
Издание:
IEC IS 62047 edition 1 version 1
ICS:
17.140.50
Описание (английский):

IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.

Технические детали

Технический комитет
SC 47F - Micro-electromechanical systems
SKU
IEC 62047-29:2017