Nanomanufacturing. Key control characteristics - Graphene-based material. Sheet resistance: Terahertz time-domain spectroscopy
Nanomanufacturing. Key control characteristics - Graphene-based material. Sheet resistance: Terahertz time-domain spectroscopy
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1 Scope This part of IEC TS 62607 establishes a standardized method to determine the electrical key control characteristic sheet resistance ( R s ) for films of graphene-based materials by terahertz time-domain spectroscopy (THz-TDS). In this technique, a THz pulse is sent to the graphene-based material. The transmitted or reflected THz waveform is measured in the time domain and transformed to the frequency domain by the fast Fourier transform (FFT). Finally, the spectrum is fitted to the Drude model (or another comparable model) to obtain the sheet resistance.
This non-contact inspection method is non-destructive, fast and robust for the mapping of large areas of graphene films, with no upper sample size limit. The method is applicable for statistical process control, comparison of graphene films produced by different vendors, or to obtain information about imperfections on the microscale such as grain boundaries and defects, etc.
Другие стандарты PD