Safety of machinery. Electrical equipment of machines - Requirements for semiconductor fabrication equipment
Safety of machinery. Electrical equipment of machines - Requirements for semiconductor fabrication equipment
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What is BS EN 60204-33 - Safety requirements for semiconductor fabrication equipment about?
BS EN 60204-33 is the 33 rd part of the BS EN 60204 multi-series that discusses the safety of machinery. BS EN 60204-33 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. The electrical equipment covered by BS EN 60204-33 commences at the point of connection of the supply to the electrical equipment (see 5.1), and includes proper instruction for its safe installation. BS EN 60204-33 is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed. Included are requirements for protective measures against electrical safety hazards as well as electrical interlock circuits that protect against non-electrical hazards. However, BS EN 60204-33 does not cover all the requirements that are needed or required by other standards or regulations in order to safeguard persons from hazards other than electrical hazards (e.g., chemical hazards...
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