Semiconductor devices. Micro-electromechanical devices - Micro-pillar compression test for MEMS materials
Semiconductor devices. Micro-electromechanical devices - Micro-pillar compression test for MEMS materials
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What is BS EN 62047-10 - Micro-pillar compression test for MEMS materials about?
BS EN 62047-10 is the 10th part of the multi-series standard used for Semiconductor devices. by using BS EN 62047-10 you can manufacture good quality MEMS devices. BS EN 62047-10 specifies a micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate the effort of specimen fabrication. The uniaxial compressive stress-strain relationship of a
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