Semiconductor devices. Micro-electromechanical devices - Generic specification for MEMS
Semiconductor devices. Micro-electromechanical devices - Generic specification for MEMS
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What is BS EN 62047-4 - Specification for Micro-electromechanical devices (MEMS) about?
BS EN 62047-4 is the fourth part of the multi-series used for Semiconductor devices. BS EN 62047-4 describes generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro T...
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