BS EN ISO 14644-14:2016 PDF

ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration

Название (английский):

BS EN ISO 14644-14:2016

ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration

Статус документа:: Отменён
Формат:: Электронный (PDF)
Дата публикации:: 31 октября 2016 г.
ICS:: 13.040.35
Технический комитет:: CEN
SKU:: BS EN ISO 14644-14:2016

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Abstract

1 Scope This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment , process equipment , components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this part of ISO 14644:

— assessment of suitability with respect to biocontamination;

— testing for suitability of decontamination agents and techniques;

— cleanability of equipment and materials;

— requirements on design of equipment and selection of materials;

— physical properties of materials (e.g. electrostatic, thermal properties);

...

BS EN ISO 14644-14:2016 PDF

Abstract

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Abstract

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