Surface chemical analysis. General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
Surface chemical analysis. General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry
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1 Scope This International Standard describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films. It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.
NOTE Any individual standard for a test material will have to specify a scope of a thickness of the surface layer as well as analyte elements, and include results of interlaboratory tests for validation of the methods.
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