BS ISO 15632:2012 PDF

Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis

Название (английский):

BS ISO 15632:2012

Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers for use in electron probe microanalysis

Статус документа:: Отменён
Формат:: Электронный (PDF)
Дата публикации:: 31 августа 2012 г.
ICS:: 19.100
SKU:: BS ISO 15632:2012

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Abstract

1 Scope This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This International Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this International Standard.

BS ISO 15632:2012 PDF

Abstract

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Abstract

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