Microbeam analysis. Analytical electron microscopy. Methods for calibrating image magnification by using reference materials with periodic structures
Microbeam analysis. Analytical electron microscopy. Methods for calibrating image magnification by using reference materials with periodic structures
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1 Scope This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope ( TEM ). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica , a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film , or an imaging plate , or detected by an image sensor built into a digital camera . This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD- TEM ) and the scanning transmission electron microscope (STEM).
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