Overview
IEC TS 62607-6-23:2025 defines a standardized, cost‑effective method to measure the key control characteristics (KCC) of graphene thin films using the Hall bar / Hall measurement method. It specifies how to determine sheet resistance, carrier density, and carrier mobility for graphene Hall devices (device length and width > 100 µm). The specification derives carrier mobility from the product of the Hall coefficient and electrical conductivity, and sheet resistance from the product of longitudinal resistance and the device aspect ratio. The Technical Specification is part of the IEC 62607 nanomanufacturing series and is optimized to avoid high‑cost photolithography processes and equipment.
Key topics and requirements
- Measurement principle: Hall effect-based determination of transverse Hall voltage and longitudinal resistance to extract Hall coefficient, carrier density, mobility and sheet resistance.
- Applicable devices: Graphene thin film Hall devices with dimensions > 100 µm; recommended for devices with carrier mobility below about 10 000 cm2/V·s (practical range for common transparent conductive films and flexible electrodes).
- Sample preparation: Substrate preparation, sample transfer and device fabrication sequences using cost‑effective, non‑photolithographic methods.
- Equipment & apparatus: Requirements and descriptions for heating stages, mask alignment devices, geometric sizing tools, electrode deposition systems, magnets, electrical measurement equipment, sample holders and oxygen plasma etching.
- Measurement procedure: Calibration of instruments, step‑by‑step Hall measurement process, ambient condition control and recording.
- Data analysis & uncertainty: Methods to compute mobility and sheet resistance, identify uncertainty sources, and apply procedures to reduce measurement uncertainty.
- Reporting: Required result fields including product/sample identification, measurement conditions, device geometry, and tabulated results. Informative annexes provide example data (e.g., CVD‑grown graphene samples).
Practical applications
- Quality control and acceptance testing of transparent conductive films, flexible electrodes, and other graphene‑based electronic components.
- Process development and benchmarking in graphene manufacturing (CVD graphene transfer, electrode deposition, device assembly) where photolithography is not used.
- Metrology and R&D laboratories validating carrier mobility, sheet resistance and carrier density for product specification and comparative testing.
- Integration into supplier/product data sheets, process control charts and certification workflows for graphene products.
Who should use this standard
- Nanomanufacturing engineers and process technicians working with graphene thin films
- Quality assurance and testing labs for electronic and optoelectronic devices
- Materials and device developers evaluating graphene transparency/conductivity tradeoffs
- Standards bodies and certification organizations assessing measurement comparability
Related standards
- Other parts of the IEC 62607 series (Nanomanufacturing – Key control characteristics) cover measurement methods and KCCs for different nanomaterials and processes. Consult the IEC webstore for the complete series and the latest editions.
Keywords: IEC TS 62607-6-23:2025, graphene, Hall bar method, sheet resistance, carrier mobility, carrier density, nanomanufacturing, key control characteristics, Hall measurement, graphene thin films.