ISO 11952:2014 PDF
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
Название (английский):
ISO 11952:2014
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 58
- Дата публикации:
- 12 мая 2014 г.
- Издание:
- ISO IS 11952 edition 1 version 1
- ICS:
- 71.040.40
Описание (английский):
ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
Технические детали
- Технический комитет
- ISO/TC 201/SC 9 - Scanning probe microscopy
- SKU
- ISO 11952:2014