ISO 13424:2013 PDF
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
Название (английский):
ISO 13424:2013
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 46
- Дата публикации:
- 23 сентября 2013 г.
- Издание:
- ISO IS 13424 edition 1 version 1
- ICS:
- 71.040.40
Описание (английский):
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
Технические детали
- Технический комитет
- ISO/TC 201/SC 7 - Electron spectroscopies
- SKU
- ISO 13424:2013