ISO 14644-10:2013 PDF
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
Название (английский):
ISO 14644-10:2013
Cleanrooms and associated controlled environments — Part 10: Classification of surface cleanliness by chemical concentration
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 30
- Дата публикации:
- 1 марта 2013 г.
- Издание:
- ISO IS 14644 edition 1 version 1
- ICS:
- 13.040.35
Описание (английский):
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.
Технические детали
- Технический комитет
- ISO/TC 209 - Cleanrooms and associated controlled environments
- SKU
- ISO 14644-10:2013