ISO 14706:2014 PDF
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 25
- Дата публикации:
- 25 июля 2014 г.
- Издание:
- ISO IS 14706 edition 2 version 1
- ICS:
- 71.040.40
ISO 14706:2014 specifies a TXRF method for the measurement of the atomic surface density of elemental contamination on chemomechanically polished or epitaxial silicon wafer surfaces. The method is applicable to the following: elements of atomic number from 16 (S) to 92 (U); contamination elements with atomic surface densities from 1 × 1010 atoms/cm2 to 1 × 1014 atoms/cm2; contamination elements with atomic surface densities from 5 × 108 atoms/cm2 to 5 × 1012 atoms/cm2 using a VPD (vapour-phase decomposition) specimen preparation method.
Технические детали
- Технический комитет
- ISO/TC 201 - Surface chemical analysis
- SKU
- ISO 14706:2014