ISO 18114:2003 PDF
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
Название (английский):
ISO 18114:2003
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 4
- Дата публикации:
- 14 апреля 2003 г.
- Издание:
- ISO IS 18114 edition 1 version 1
- ICS:
- 71.040.40
Описание (английский):
ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.
Технические детали
- Технический комитет
- ISO/TC 201/SC 6 - Secondary ion mass spectrometry
- SKU
- ISO 18114:2003