ISO 18452:2005 PDF

Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of thickness of ceramic films by contact-probe profilometer

Название (английский):

ISO 18452:2005

Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of thickness of ceramic films by contact-probe profilometer

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 9
Дата публикации:: 16 ноября 2005 г.
Издание:: ISO IS 18452 edition 1 version 1
ICS:: 81.060.30

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Описание (английский):

ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.

Технические детали

Технический комитет: ISO/TC 206 - Fine ceramics
SKU: ISO 18452:2005

Abstract

Overview

ISO 18452:2005 specifies a standardized method to determine the thickness of fine ceramic films and ceramic coatings using a contact‑probe profilometer (stylus profilometer). The method is intended for thin films in the nominal range 10 nm to 10 000 nm, requiring a clearly defined boundary between coated and uncoated substrate areas. The standard defines measurement principle, apparatus requirements, specimen preparation, test procedure, calculation method and reporting.

Key Topics and Requirements

Measurement principle: Step‑height measurement by scanning a stylus across the coating edge and calculating the vertical difference at the inflection point of the profile.
Measurement range: Suitable for 10–10 000 nm film thicknesses; under optimal conditions profilometers may resolve steps of only a few nanometres, though accuracy degrades at very small thicknesses.
Apparatus:
- Contact‑probe profilometer conforming to ISO 3274.
- Diamond stylus with conical tip (vertical angles 60° or 90°) and tip radii typically 2 µm, 5 µm, 10 µm or 12.5 µm.
- Instrument calibration using step‑height calibration standards; calibration conditions should match measurement conditions.
Test specimen & surface:
- Distinct coated/uncoated boundary required.
- Surface roughness (Ra) of substrate and coating should be ≤ 1/5 of the step height.
- Average roughness wavelength should be

Overview

Key Topics and Requirements

Measurement principle: Step‑height measurement by scanning a stylus across the coating edge and calculating the vertical difference at the inflection point of the profile.
Measurement range: Suitable for 10–10 000 nm film thicknesses; under optimal conditions profilometers may resolve steps of only a few nanometres, though accuracy degrades at very small thicknesses.
Apparatus:
- Contact‑probe profilometer conforming to ISO 3274.
- Diamond stylus with conical tip (vertical angles 60° or 90°) and tip radii typically 2 µm, 5 µm, 10 µm or 12.5 µm.
- Instrument calibration using step‑height calibration standards; calibration conditions should match measurement conditions.
Test specimen & surface:
- Distinct coated/uncoated boundary required.
- Surface roughness (Ra) of substrate and coating should be ≤ 1/5 of the step height.
- Average roughness wavelength should be

ISO 18452:2005 PDF

Технические детали

Abstract

Overview

Key Topics and Requirements

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Abstract

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