ISO 19606:2017 PDF

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

Название (английский):

ISO 19606:2017

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

Статус документа:: Отменён
Формат:: Электронный (PDF)
Количество страниц:: 24
Дата публикации:: 13 января 2017 г.
Издание:: ISO IS 19606 edition 1 version 1
ICS:: 81.060.30

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Описание (английский):

ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.

Технические детали

Технический комитет: ISO/TC 206 - Fine ceramics
SKU: ISO 19606:2017

Abstract

Overview

ISO 19606:2017 specifies a test method to evaluate the adequacy of AFM probe tips for measuring surface roughness of fine-ceramic (advanced/technical ceramic) thin films. The standard targets measurements where the arithmetical mean roughness Ra is about 1 nm to 30 nm and the mean width of roughness profile elements RSm is about 0.04 µm to 2.5 µm. Its primary purpose is to ensure reliable, reproducible AFM surface roughness results in production and quality‑assurance environments by providing a method to evaluate probe‑tip diameter (curvature) and related measurement error.

Key Topics and Requirements

Probe‑tip diameter definition: Probe‑tip diameter D is defined at a distance of 10 nm from the tip end.
Probe‑tip evaluation standard plate: A spike matrix plate is used to assess tip geometry. Typical plate features include: tip curvature radius ~10 nm, aperture angles 20° or 50°, tip height 300–600 nm, nearest‑neighbour spacing 2.12 µm, plate size 5 mm × 5 mm.
Test environment: Measurements should be made under stable conditions (recommended temperature 18–25 °C, humidity ≤70%, low acoustic noise ≤60 dB and minimal mechanical vibration - see the standard for exact vibration criteria).
AFM hardware: Dynamic‑mode cantilevers dedicated for the method with resonant frequency >100 kHz; scanner capable of >10 µm × 10 µm XY scan area; specimen stage supporting centred scanning.
Calibration: X‑Y and Z axes must be calibrated using a certified grating/step standard (recommended grating pitch **

Overview

Key Topics and Requirements

Probe‑tip diameter definition: Probe‑tip diameter D is defined at a distance of 10 nm from the tip end.
Probe‑tip evaluation standard plate: A spike matrix plate is used to assess tip geometry. Typical plate features include: tip curvature radius ~10 nm, aperture angles 20° or 50°, tip height 300–600 nm, nearest‑neighbour spacing 2.12 µm, plate size 5 mm × 5 mm.
Test environment: Measurements should be made under stable conditions (recommended temperature 18–25 °C, humidity ≤70%, low acoustic noise ≤60 dB and minimal mechanical vibration - see the standard for exact vibration criteria).
AFM hardware: Dynamic‑mode cantilevers dedicated for the method with resonant frequency >100 kHz; scanner capable of >10 µm × 10 µm XY scan area; specimen stage supporting centred scanning.
Calibration: X‑Y and Z axes must be calibrated using a certified grating/step standard (recommended grating pitch **

ISO 19606:2017 PDF

Технические детали

Abstract

Overview

Key Topics and Requirements

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Abstract

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