ISO 24688:2022 PDF

Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods

Название (английский):

ISO 24688:2022

Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 8
Дата публикации:: 22 июля 2022 г.
Издание:: ISO IS 24688 edition 1 version 1
ICS:: 25.220.01

Тип поставки:

Full version120 €Read online 24h10 €Read online 72h15 €

Язык документа:

ruen

Срок поставки:2 раб. дн. (перевод)

Цена:120 €

Описание (английский):

This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).

Технические детали

Технический комитет: ISO/TC 107/SC 9 - Physical vapor deposition coatings
SKU: ISO 24688:2022

Abstract

Overview

ISO 24688:2022 specifies how to determine the modulation period of nano‑multilayer coatings using low‑angle X‑ray methods - primarily X‑ray reflectivity (XRR) and glancing incidence X‑ray diffraction (GIXRD). The standard covers substrate preparation, coating and apparatus requirements, calibration procedures, test conditions and the calculation approach used to extract the modulation period (the thickness of one A+B layer unit) from low‑angle X‑ray fringe or diffraction patterns.

Key SEO terms: ISO 24688:2022, modulation period, nano‑multilayer coatings, XRR, GIXRD, low‑angle X‑ray methods.

Key topics

Measurement principles
- XRR: interference fringes from reflections at layer interfaces; fringe periodicity relates to modulation period.
- GIXRD: low‑angle diffraction peaks from periodic interfaces; fixed small incident angle α.
Calculation
- Modulation period Λ is obtained from peak positions using a modified Bragg relationship that involves diffraction order n, X‑ray wavelength λ, peak angle θ and refractive index deviation δ.
Sample requirements
- Substrate roughness: <50 nm peak‑to‑valley or <5 nm RMS before coating.
- Flat measurement area: ≥10 mm diameter (or comparable surrogate sample).
- Modulation periods: <200 nm (instrument resolution limit).
- Surface roughness Rpk guidance: if >0.05 µm use GIXRD; if ≤0.05 µm both XRR and GIXRD applicable (XRR is more accurate).
Apparatus and optics
- Four‑circle goniometer, adjustable sample holder, beam‑conditioning (e.g., Goebel mirror), 0.1 mm incident/receiving slits.
- Typical targets: Mo, Cu, Co with appropriate filters (e.g., Ni for Cu).
Calibration and test conditions
- Si powder standard (annealed, >100 µm) for angular calibration; target θ deviation

Overview

Key SEO terms: ISO 24688:2022, modulation period, nano‑multilayer coatings, XRR, GIXRD, low‑angle X‑ray methods.

Key topics

Measurement principles
- XRR: interference fringes from reflections at layer interfaces; fringe periodicity relates to modulation period.
- GIXRD: low‑angle diffraction peaks from periodic interfaces; fixed small incident angle α.
Calculation
- Modulation period Λ is obtained from peak positions using a modified Bragg relationship that involves diffraction order n, X‑ray wavelength λ, peak angle θ and refractive index deviation δ.
Sample requirements
- Substrate roughness: <50 nm peak‑to‑valley or <5 nm RMS before coating.
- Flat measurement area: ≥10 mm diameter (or comparable surrogate sample).
- Modulation periods: <200 nm (instrument resolution limit).
- Surface roughness Rpk guidance: if >0.05 µm use GIXRD; if ≤0.05 µm both XRR and GIXRD applicable (XRR is more accurate).
Apparatus and optics
- Four‑circle goniometer, adjustable sample holder, beam‑conditioning (e.g., Goebel mirror), 0.1 mm incident/receiving slits.
- Typical targets: Mo, Cu, Co with appropriate filters (e.g., Ni for Cu).
Calibration and test conditions
- Si powder standard (annealed, >100 µm) for angular calibration; target θ deviation

ISO 24688:2022 PDF

Технические детали

Abstract

Overview

Key topics

Похожие стандарты

Abstract

Overview

Key topics

Похожие стандарты

Water quality — Biological classification of rivers — Part 1: Guidance on the interpretation of biological qu…

Standard Practice for Use of a Radiochromic Liquid Dosimetry System (Withdrawn 2020)

Standard Practice for Dosimetry in Gamma Irradiation Facilities for Food Processing (Withdrawn 2013)

Standard Practice for Dosimetry in Electron Beam and X-Ray (Bremsstrahlung) Irradiation Facilities for Food P…

Standard Practice for Dosimetry in Radiation Processing

Standard Terminology for Additive Manufacturing—Coordinate Systems and Test Methodologies

Additive Manufacturing — Round Robin Testing — General Guidelines

Standard Guide for Additive Manufacturing – General Principles – Requirements for Purchased AM Parts