Surface chemical analysis. Depth profiling. Measurement of sputtered depth
Surface chemical analysis. Depth profiling. Measurement of sputtered depth
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What is ISO/TR 15969 about?
ISO/TR 15969 specifies guidelines for measuring the sputtered depth in sputtered depth profiling which are applicable to techniques of surface chemical analysis. The depth typically determined by this approach is between 1 nm to 500 μm. ISO/TR 15969 specifies determination of depth scale in sputtered depth profiling where signal intensity is obtained as a function of sputtering time.
Who is ISO/TR 15969 for?
ISO/TR 15969 on surface chemical analysis is relevant to:
Chemical engineers
Aerospace industry
Другие стандарты PD