1 Scope
This part of IEC 62047 specifies the requirements and testing method to measure the tensile strength of membrane with nanoscale thickness (length from 100 μm to 5 000 μm, width from 100 μm to 1 000
μm, thickness from 50 nm to 500 nm) which is fabricated by micromachining technology
used in silicon-based micro-electromechanical system (MEMS).
This document is applicable to in-situ tensile strength measurement of nanoscale thickness membrane manufactured by microelectronics technology and related micromachining technology.
With the devices scaling, the tensile strength degradation, induced by defects and contaminations, becomes severer. This document
specifies an in-situ testing method of the tensile strength of membrane with nanoscale thickness based on a MEMS technique. This document does not need intricate
instruments (such as scanning probe microscopy and nanoindenter) and special test
specimens.
Since in-situ on-chip tester in this document and device are fabricated with the same process on the same wafer,
this document can give some practical reference for the design part.